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Communication Dans Un Congrès Année : 2023

Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials

Résumé

This paper presents a resonating quartz MEMS magnetometer exploiting the torque induced by the external magnetic field on a stack of ferromagnetic and antiferromagnetic materials and the differential measurement of the resonance frequencies of two DETFs. It is targeted for applications such as magneto-inertial navigation. This sensor was fabricated using a wet HF/NH4F etching process and its working principle was proven correct with a magnetic sensitivity of 770 Hz/T.
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Dates et versions

hal-04100093 , version 1 (17-05-2023)

Identifiants

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Charles Mauc, Thomas Perrier, Raphaël Levy, Johan Moulin, Patrick Kayser. Magnetometer based on a quartz MEMS resonator with two DETFs and a stack of magnetic materials. 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), May 2022, Avignon, France. pp.1-4, ⟨10.1109/INERTIAL53425.2022.9787760⟩. ⟨hal-04100093⟩
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